A Qualitative Study on Optimized MOSFET Doping Profiles

نویسندگان

  • M. Stockinger
  • S. Selberherr
چکیده

We present the two-dimensional optimization of the acceptor doping profile of a 0.25 /im MOSFET which improves the drive current by 48% compared to a uniformly doped device delivering the same drain-source leakage current. Various values for the supply voltage and the allowed leakage current are used to qualitatively investigate their influence on the optimal profile.

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تاریخ انتشار 2007